Piezoelectric resonator structure and method for manufacturing a coupled resonator device
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United States of America Patent
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May 19, 2009
Grant Date -
Dec 18, 2008
app pub date -
Jun 15, 2007
filing date -
Jun 15, 2007
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Abstract
A method for manufacturing a coupled resonator device includes forming a first part of a plurality of layers, trimming an exposed layer of the first part and forming a remaining part of the plurality of layers. The coupled resonator device includes a stack of the plurality of layers, the plurality of layers including a first piezo-layer with a first and a second electrode layer sandwiching the first piezo-layer, a second piezo-layer with a first and a second electrode layer sandwiching the second piezo-layer, the first and second piezo-layers being acoustically coupled to each other.
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