Micro sample heating apparatus and method of making the same

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United States of America Patent

PATENT NO 7533564
APP PUB NO 20080060454A1
SERIAL NO

11381129

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Abstract

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A micro sample heating apparatus has a substrate, a micro heating device disposed on a first surface of the substrate, a cavity having a vertical sidewall and corresponding to the micro heating device positioned in a second surface of the substrate, and an isolation structure positioned on the second surface of the substrate. The isolation structure has an opening corresponding to the cavity, and the cavity and the opening form a sample room.

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Patent Owner(s)

Patent OwnerAddress
GREDMANN TAIWAN LTD9F NO 170 SEC 3 MIN CHUAN EAST ROAD JHONGSHAN DIST TAIPEI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kang, Yu-Fu Taipei , TW 14 29
Pan, Chin-Chang Taipei Hsien , TW 6 18

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