Angle interferometers
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United States of America Patent
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May 12, 2009
Grant Date -
Mar 22, 2007
app pub date -
Aug 15, 2006
filing date -
Aug 16, 2005
priority date (Note) -
Expired
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Abstract
Methods and systems for determining information about the incident angle of a beam are disclosed, the method including directing a beam having an s-polarized component and a p-polarized component to reflect from an interface at a non-normal angle, where the non-normal reflection introduces for each component a phase change upon reflection that is different for each component, and measuring an optical interference signal related to the phase change between the components of the reflected beam.
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