LRL vector calibration to the end of the probe needles for non-standard probe cards for ATE RF testers
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United States of America Patent
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May 12, 2009
Grant Date -
Feb 14, 2008
app pub date -
Aug 8, 2006
filing date -
Aug 8, 2006
priority date (Note) -
Expired
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Abstract
A method and apparatus for radio frequency vector calibration of s-parameter measurements to the tips of the wafer probe needles of an automatic test equipment production tester. The method involves a modified Line-Reflect-Line (LRL) calibration routine that uses a Thru-Reflect-Line to LRL shift to eliminate the need for a precisely characterized reflect standard used during a conventional LRL calibration. The method further involves de-embedding the non-ideal effects of the non-zero length thru standard used during the calibration routine to improve measurement accuracy of the tester. The apparatus may involve the use of RF relays to allow multiple wafer probe needles to share RF test ports.
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