Method of producing a conductive layer including two metal nitrides
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United States of America Patent
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May 12, 2009
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N/A
app pub date -
Dec 8, 2005
filing date -
Dec 10, 2004
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Abstract
In a method for producing a conductive layer a substrate is provided. On the substrate, a layer includes at least two different metal nitrides. In one embodiment, on a surface of the substrate a first metal nitride layer is deposited, followed by a second metal nitride layer formed thereon. A third metal layer is then deposited on a surface of the second metal nitride layer.
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