Charge neutralizer for glass substrate

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United States of America Patent

PATENT NO 7529074
APP PUB NO 20070188970A1
SERIAL NO

11443246

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention provides a charge neutralizer for accurately irradiating a soft X ray into a narrow gap after a glass substrate is lifted up. or not.

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Patent Owner(s)

Patent OwnerAddress
FUTURE VISION INC3RD FLOOR HAKUA BLDG 2-4-1 AKASAKA MINATO-KU TOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujino, Masaharu Sendai, JP 1 10
Fukuchi, Yasuhiko Sendai, JP 3 21
Inaba, Hitoshi Sagamihara, JP 33 299
Kochi, Masato Ichikawa, JP 1 10
Nakajima, Kazuyoshi Nagaokakyo, JP 12 103

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