Compensation of turbulent effects of gas in measurement paths of multi-axis interferometers
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United States of America Patent
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May 5, 2009
Grant Date -
Nov 16, 2006
app pub date -
Apr 28, 2006
filing date -
Apr 29, 2005
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Expired
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Abstract
In general, in a first aspect, the invention features a method that includes using an interferometry assembly to provide three different output beams, each output beam including an interferometric phase related to an optical path difference between a corresponding first beam and a corresponding second beam, each first beam contacting a measurement object at least once, monitoring the interferometric phases for each of the three different output beams, and deriving information about variations in the optical properties of a gas in the first beam paths from the three monitored phases.
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