Apparatus for crystallizing semiconductor with laser beams

United States of America Patent

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May 5, 2009
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N/A
app pub date
Oct 30, 2007
filing date
May 17, 2002

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Expired

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C, rotatably disposed above the second stage to support an amorphous semiconductor.

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Patent Owner	Address
SHARP KABUSHIKI KAISHA	22-22 NAGAIKE-CHO ABENO-KU OSAKA 545-8522

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Ohki, Koichi	Mitaka, JP	9	56
Sasaki, Nobuo	Kawasaki, JP	114	2781

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Apparatus for crystallizing semiconductor with laser beams

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United States of America Patent

11980287

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US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
May 05, 2009	US,7528023,B2 US7528023B2	GRANTED PATENT AS SECOND PUBLICATION
March 13, 2008	US,20080062498,A1 US20080062498A1	FIRST PUBLISHED PATENT APPLICATION

PATENT NO	7528023
SERIAL NO	11980287
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11980287

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