Single crystal silicon carbide and method for producing the same
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United States of America Patent
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May 5, 2009
Grant Date -
Dec 2, 2004
app pub date -
Jun 4, 2001
filing date -
Jun 4, 2001
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Abstract
or less, and the crystal has a terrace of 10 micrometer or more and a multi-molecular layer step as the minimum unit of a three-molecular layer.
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