Micropump for integrated device for biological analyses
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United States of America Patent
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May 5, 2009
Grant Date -
Jul 22, 2004
app pub date -
Sep 16, 2003
filing date -
Sep 17, 2002
priority date (Note) -
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Abstract
A micropump includes a body (10) of semiconductor material, accommodating fluid-tight chambers (32), having an internal preset pressure, lower than atmospheric pressure. The fluid-tight chambers (32), sealed by a diaphragm (35) that can be electrically opened, are selectively openable using a first electrode (37) and second electrodes (38), accommodating between them portions of the diaphragm (35).
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