X-ray source for materials analysis systems
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United States of America Patent
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Apr 28, 2009
Grant Date -
Oct 19, 2006
app pub date -
Jun 18, 2002
filing date -
Jun 19, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A miniaturized, increased efficiency x-ray source for materials analysis includes a laser source, an optical delivery structure, a laser-driven thermionic cathode (108), an anode (122), and a target from the laser source and directs the beam onto a surface of the themionic cathode. The surfaces electrons form an electron beam along a beam path. The target element (110) is disposed in the beam path, and emits x-rays in response to incident accelerated electrons from the thermionic cathode. The target element includes an inclined surface that forms an angle of inclination (113) of about 40 degrees with respect to the electon beam path, so that x-rays are emitted from the target substantially at an angle of about 45 degrees with respect to the electron beam path.
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