Method and apparatus for measuring the size of free air balls on a wire bonder
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United States of America Patent
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Apr 28, 2009
Issued Date -
N/A
app pub date -
Jun 9, 2005
filing date -
Jul 24, 2001
priority date (Note) -
Expired
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Abstract
A system for measuring the size of free air balls for use with a wire bonder having a wire bonding tool and an Electric Flame Off (EFO) device is provided. The system includes an imager disposed above a first image plane, a prism disposed below the imager, and at least one lens positioned between the first image plane and the prism in a first optical path. The at least one lens is positioned between the prism and the imager in a second optical path, where the second optical path is different from the first optical path. An image of the free air ball disposed at a lower portion of the wire bonding tool is provided to the imager via the prism and the at least one lens.
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