Method for fabricating polarization reversal structure and reversal structure
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United States of America Patent
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Apr 21, 2009
Grant Date -
Nov 8, 2007
app pub date -
Mar 1, 2007
filing date -
Oct 14, 2004
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Abstract
When a domain inversion part is produced by means of electric field polling process, damage in the vicinity of the forward end of a comb electrode and deviation of width of each domain inversion part are to be reduced. A polarization domain inversion structure has polarization domain inversion parts is produced by electric field poling process using a comb electrode formed on one surface of a substrate of a ferroelectric single crystal and of a single domain, and the comb electrode has a plurality of electrode portions and feeding portion. Each of the electrode portions corresponds with each domain inversion part of the domain inversion structure. The electrode portion has a plurality of low resistance pieces arranged in a direction “F” intersecting the longitudinal direction “E” of the electrode portion and spaced apart with each other.
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