Plasma processing apparatus

United States of America Patent

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Apr 21, 2009
Grant Date
Nov 11, 2004
app pub date
Jun 7, 2004
filing date
May 26, 1999

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Expired

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are optimized so as to be capable of supplying a microwave having a large power.

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TADAHIRO OHMI	MIYAGI PREFECTURE JAPAN

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Inventor Name	Address	# of filed Patents	Total Citations
Hirayama, Masaki	Sendai, JP	135	4253
Ohmi, Tadahiro	1-17-301, Komegafukuro 2-chome, Aoba-Ku	798	14083

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Plasma processing apparatus

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United States of America Patent

10861388

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PATENT NO	7520245
APP PUB NO	20040221809A1
SERIAL NO	10861388
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 21, 2009	US,7520245,B2 US7520245B2	GRANTED PATENT AS SECOND PUBLICATION
November 11, 2004	US,20040221809,A1 US20040221809A1	FIRST PUBLISHED PATENT APPLICATION

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10861388

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