Probe card and a method for detecting defects using a probe card and an additional inspection
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United States of America Patent
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Apr 14, 2009
Grant Date -
Dec 15, 2005
app pub date -
Feb 15, 2005
filing date -
Feb 17, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method and system for defect localization including (i) receiving a test structure that includes at least one conductor that is at least partially covered by an electro-optically active material; (ii) providing an electrical signal to the conductor, so as to charge at least a portion of the conductor; and (iii) imaging the test structure to locate a defect.
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