Thin-film semiconductor substrate, method of manufacturing thin-film semiconductor substrate, method of crystallization, apparatus for crystallization, thin-film semiconductor device, and method of manufacturing thin-film semiconductor device
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United States of America Patent
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Apr 14, 2009
Grant Date -
Dec 21, 2006
app pub date -
Aug 25, 2006
filing date -
Jul 16, 2003
priority date (Note) -
Expired
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Abstract
A thin-film semiconductor substrate includes an insulative substrate, an amorphous semiconductor thin film that is formed on the insulative substrate, and a plurality of alignment marks that are located on the semiconductor thin film and are indicative of reference positions for crystallization.
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