Scanning probe microscope for measuring angle and method of measuring a sample using the same
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United States of America Patent
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Apr 7, 2009
Grant Date -
Mar 27, 2008
app pub date -
Nov 1, 2006
filing date -
Jun 2, 2006
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Abstract
Provided are a scanning probe microscope (SPM) that prevents a distortion of an image caused by alignment errors of scanners and a method of measuring a sample using the same. The scanning probe microscope comprises a probe; a first scanner changing a position of the probe along a straight line; a second scanner changing a position of a sample in a plane; and an adjusting device adjusting a position of the second scanner or the first scanner so that the straight line where the position of the probe is changed using the first scanner is perpendicular to the plane in which the position of the sample is changed using the second scanner.
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