Scanning electron microscope

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United States of America Patent

PATENT NO 7511271
APP PUB NO 20060186337A1
SERIAL NO

11230642

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.

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Patent Owner(s)

Patent OwnerAddress
HITACHI SCIENCE SYSTEMS LTDHITACHINAKA-SHI IBARAKI-KEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hatano, Michio Tokyo, JP 25 202
Ito, Sukehiro Hitachinaka, JP 56 388
Katane, Junichi Naka, JP 27 136
Tomita, Shinichi Hitachinaka, JP 22 235

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