Nanotube probe and a method for manufacturing the same
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United States of America Patent
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Mar 31, 2009
Grant Date -
Jan 25, 2007
app pub date -
Sep 8, 2004
filing date -
Sep 8, 2003
priority date (Note) -
Expired
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Abstract
of the cantilever. The partial coating films are separated not to overlap each other. By minimizing the size of partial coating film as well as by narrowing down the beam diameter, coating time may be further shortened. With the beam diameter narrowed down, excessive deposit of impurities can be put under control.
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