Pressure sensor
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United States of America Patent
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Mar 31, 2009
Grant Date -
Jan 31, 2008
app pub date -
Aug 6, 2005
filing date -
Sep 24, 2004
priority date (Note) -
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Abstract
The invention relates to a pressure sensor with a carrier (2), which in an inner region comprises a membrane (4) on which at least one first measurement element (R.sub.1-) for detecting a pressure impingement of the membrane (4) is arranged, wherein additionally at least one second measurement element (R.sub.3-) for detecting a pressure impingement of the membrane (4) is arranged on the membrane, wherein the first measurement element (R.sub.1-) and the second measurement element (R.sub.3-) are arranged distanced differently far from the edge of the membrane, and the output signals of the first and the second measurement element (R.sub.1-, R.sub.3-) are evaluated together in a manner such that the two measurement elements (R.sub.1-, R.sub.3-) detect a differential pressure acting on the membrane (4), and thereby compensate the influence of the system pressure acting on both sides of the membrane (4).
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