MEMS micromotor and timepiece equipped with this micromotor
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United States of America Patent
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Mar 17, 2009
Grant Date -
Aug 21, 2008
app pub date -
Nov 13, 2007
filing date -
Nov 13, 2006
priority date (Note) -
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Abstract
The invention proposes a MEMS micromotor produced in a plate made of crystalline or amorphous material, in particular based on silicon, which comprises a lower layer forming a substrate, and an upper layer in which at least one actuator and a rotor is etched, the actuator driving the rotor in rotation about a shaft (64), characterized in that the shaft (64) is connected to the plate, in that the shaft (64) extends axially through a hole of the plate, and in that the shaft (64) is clamped in the hole and centered in the hole by means of elastic fixing structures which are produced by etching in the substrate and which are arranged on the circumference of the hole.
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