Crystallization apparatus, crystallization method, and phase shifter
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United States of America Patent
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Mar 17, 2009
Grant Date -
Jan 24, 2008
app pub date -
Sep 26, 2007
filing date -
Sep 9, 2002
priority date (Note) -
Expired
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Abstract
A crystallization apparatus includes an illumination system which applies illumination light for crystallization to a non-single-crystal semiconductor film, and a phase shifter which includes first and second regions disposed to form a straight boundary and transmitting the illumination light from the illumination system by a first phase retardation therebetween, and phase-modulates the illumination light to provide a light intensity distribution having an inverse peak pattern that light intensity falls in a zone of the non-single-crystal semiconductor film containing an axis corresponding to the boundary. The phase shifter further includes a small region which extends into at least one of the first and second regions from the boundary and transmits the illumination light by a second phase retardation with respect to the at least one of the first and second regions.
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