Wafer carrier
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Mar 17, 2009
Grant Date -
Jan 26, 2006
app pub date -
Oct 12, 2004
filing date -
Jul 21, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A wafer carrier for carrying a wafer includes a transparent base and a conducting layer. The transparent base has dimensions similar to that of the wafer, and bonds the wafer with a bonding layer. The conducting layer is transparent, and can be attracted by an electrostatic chuck so that the electrostatic chuck can deliver the wafer.
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