High purity silicon carbide wafer boats
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United States of America Patent
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Mar 10, 2009
Grant Date -
Jul 7, 2005
app pub date -
Jan 6, 2004
filing date -
Jan 6, 2004
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Abstract
A high purity ceramic article having a typical pore size of at least about 15 μm and an active impurity concentration of less than about 400 ppm can be prepared by molding ceramic powder, sintering to vaporize any active impurity components, washing to dissolve any remaining active impurity components with an acid solution, and oxidizing to remove any residual active impurity components.
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