System for monitoring foreign particles, process processing apparatus and method of electronic commerce
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United States of America Patent
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Mar 3, 2009
Grant Date -
Jul 19, 2007
app pub date -
Mar 23, 2007
filing date -
Aug 2, 2002
priority date (Note) -
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Abstract
A system for monitoring foreign matter includes a manufacturing line having plural process processing apparatuses, a production management system which manages the processing of workpieces in the manufacturing line, plural optical heads which monitor foreign matter in relation to at least one of the workpieces, and which provide an output signal indicative thereof, and at least one image signal processing unit provided in a lesser number than a number of the plural optical heads for processing the output signal therefrom.
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