Electronic components comprising adjustable-capacitance micro-electro-mechanical capacitors
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United States of America Patent
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Feb 24, 2009
Grant Date -
Nov 30, 2006
app pub date -
Feb 17, 2004
filing date -
Feb 18, 2003
priority date (Note) -
Expired
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Abstract
Electronic component comprising at least one micro-electromechanical capacitor with adjustable capacitance comprising two electrodes free to move with respect to each other, and a control circuit (30) comprising measurement means (32) to measure the capacitance of the capacitor, means (35) of determining a capacitance difference between the measured capacitance of the capacitor and a set capacitance value, means (35 to 38) for injecting an electrical charge in a control electrode so as to create an electrostatic force capable of moving one of the two electrodes with respect to the other electrode and thus adjusting the capacitance of the capacitor, the injected electrical charge being determined as a function of the capacitance difference. This component is suitable for making an adjustable delay line, an adjustable quarter wave impedance transformer or for measuring the voltage, the power or the average intensity of an electrical signal.
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