In situ determination of pixel mapping in interferometry
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United States of America Patent
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Feb 24, 2009
Grant Date -
Aug 30, 2007
app pub date -
Feb 24, 2006
filing date -
Feb 24, 2006
priority date (Note) -
Expired
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Abstract
Interferometric methods and apparatus by which the map between pixel positions and corresponding part locations are determined in situ. The part under test, which is assumed to be a rigid body, is precisely moved from a base position to at least one other position in one to six degrees of freedom in three-dimensional space. Then, the actual displacements are obtained. The base position is defined as the position with the smallest fringe density. Measurements for the base and all subsequent positions are stored. After having collected at least one measurement for each degree of freedom under consideration, the part coordinates are calculated using the differences of the various phase maps with respect to the base position. The part coordinates are then correlated with the pixel coordinates and stored.
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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ZYGO CORPORATION | 21 LAUREL BROOK ROAD MIDDLEFIELD CT 06455 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Dresel, Thomas | Nuremberg, DE | 3 | 31 |
# of filed Patents : 3 Total Citations : 31 |
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Patent Citation Ranking
- 4 Citation Count
- G01B Class
- 3.04 % this patent is cited more than
- 16 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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