In situ determination of pixel mapping in interferometry

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United States of America Patent

PATENT NO 7495773
APP PUB NO 20070201035A1
SERIAL NO

11361181

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Abstract

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Interferometric methods and apparatus by which the map between pixel positions and corresponding part locations are determined in situ. The part under test, which is assumed to be a rigid body, is precisely moved from a base position to at least one other position in one to six degrees of freedom in three-dimensional space. Then, the actual displacements are obtained. The base position is defined as the position with the smallest fringe density. Measurements for the base and all subsequent positions are stored. After having collected at least one measurement for each degree of freedom under consideration, the part coordinates are calculated using the differences of the various phase maps with respect to the base position. The part coordinates are then correlated with the pixel coordinates and stored.

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ZYGO CORPORATION21 LAUREL BROOK ROAD MIDDLEFIELD CT 06455

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Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2006200720082009201020112012201320142015201620170255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dresel, Thomas Nuremberg, DE 3 31

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  • 4 Citation Count
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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges244071776347221567341401 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0255075100125150175200225250275300325350375400425450

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