Semiconductor light-emitting device and manufacturing method therefor

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United States of America Patent

PATENT NO 7495263
APP PUB NO 20010020699A1
SERIAL NO

09778045

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Abstract

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On a GaAs substrate (1), are formed a DBR (Distributed Bragg Reflector) (3), and a light-emitting layer (5) made of a plurality of layers of Al.sub.yGa.sub.zIn.sub.1-y-zP (0.ltoreq.y.ltoreq.1, 0.ltoreq.z.ltoreq.1) above the DBR (3). A semiconductor layer or a plurality of semiconductor layers (6)-(10) having a number of layers of 1 or more are formed on the light-emitting layer (5), and a grating pattern for scattering light is formed on a surface of the semiconductor layer (9) by photolithography and by etching with a sulfuric acid/hydrogen peroxide based etchant. Thus, a semiconductor device small in radiation angle dependence of light emission wavelength, as well as a manufacturing method therefor, are provided.

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Patent Owner(s)

Patent OwnerAddress
XIAMEN SAN'AN OPTOELECTRONICS CO LTDNO 841-899 MIN AN ROAD HONGTANG TOWN TONGAN DISTRICT XIAMEN 361100

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hosoba, Hiroyuki Souraku-gun , JP 33 335
Kurahashi, Takahisa Kashiba , JP 32 287
Murakami, Tetsurou Tenri , JP 16 138
Nakatsu, Hiroshi Tenri , JP 47 518
Ohyama, Shouichi Ikoma-gun , JP 12 62

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