Diffusion barrier layer and method for manufacturing a diffusion barrier layer
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United States of America Patent
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Feb 17, 2009
Grant Date -
Sep 8, 2005
app pub date -
Feb 18, 2005
filing date -
Feb 20, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A diffusion barrier system for a display device comprising a layer system with at least two layers of dielectric material, wherein at least two adjacent layers of that layer system comprise the same material. A respective method for manufacturing such a diffusion barrier system in a single process chamber of a plasma deposition system has the steps of introducing a substrate to be treated in said process chamber, discretely varying in a controlled manner during deposition at least one process parameter in the process chamber, without completely interrupting such process parameter, which results in layers with different properties and finally unloading said substrate from said process.
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