SEM technique for imaging and measuring electronic transport in nanocomposites based on electric field induced contrast

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United States of America Patent

PATENT NO 7491934
APP PUB NO 20070164218A1
SERIAL NO

11331840

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Abstract

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Methods and apparatus are described for SEM imaging and measuring electronic transport in nanocomposites based on electric field induced contrast. A method includes mounting a sample onto a sample holder, the sample including a sample material; wire bonding leads from the sample holder onto the sample; placing the sample holder in a vacuum chamber of a scanning electron microscope; connecting leads from the sample holder to a power source located outside the vacuum chamber; controlling secondary electron emission from the sample by applying a predetermined voltage to the sample through the leads; and generating an image of the secondary electron emission from the sample. An apparatus includes a sample holder for a scanning electron microscope having an electrical interconnect and leads on top of the sample holder electrically connected to the electrical interconnect; a power source and a controller connected to the electrical interconnect for applying voltage to the sample holder to control the secondary electron emission from a sample mounted on the sample holder; and a computer coupled to a secondary electron detector to generate images of the secondary electron emission from the sample.

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Patent Owner(s)

Patent OwnerAddress
UT-BATTELLE LLCBLDG 5002 MS-6265 ONE BETHEL VALLEY ROAD OAK RIDGE TN 37831-6265

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Geohegan, David B Knoxville, US 13 195
Guillorn, Michael Brooktondale, US 1 8
Jesse, Stephen Knoxville, US 19 158

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