Apparatus and method for controlled particle beam manufacturing
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United States of America Patent
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Feb 10, 2009
Grant Date -
Dec 6, 2007
app pub date -
Aug 20, 2007
filing date -
Jul 8, 2005
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Abstract
A chamber for exposing a workpiece to charged particles includes a charged particle source for generating a stream of charged particles, a collimator configured to collimate and direct the stream of charged particles from the charged particle source along an axis, a beam digitizer downstream of the collimator configured to create a digital beam including groups of at least one charged particle by adjusting longitudinal spacing between the charged particles along the axis, a deflector downstream of the beam digitizer including a series of deflection stages disposed longitudinally along the axis to deflect the digital beams, and a workpiece stage downstream of the deflector configured to hold the workpiece.
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