Semiconductor article and method for manufacturing with reduced base resistance

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United States of America Patent

PATENT NO 7488663
APP PUB NO 20060099770A1
SERIAL NO

11266209

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Abstract

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A method for manufacturing a semiconductor article and a semiconductor article is provided, wherein a base region of a first semiconductor material is applied, a silicide layer is applied above the base region, after the application of the silicide layer, an opening is created in the silicide layer by removing the silicide layer within the area of the opening, and after this, an emitter region is formed within the opening.

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Patent Owner(s)

Patent OwnerAddress
ATMEL AUTOMOTIVE GMBH74072 HEILBRONN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bromberger, Christoph Heilbronn, DE 29 119

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