Titania-silica glass
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 3, 2009
Grant Date -
Apr 24, 2008
app pub date -
Oct 18, 2007
filing date -
Oct 20, 2006
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
To provide titania-silica glass which is transparent glass of low thermal expansion, in particular, is of a low thermal expansion coefficient over a wide range of temperatures of 0 to 100° C. (an operating temperature range) when it is used as a photomask or a mirror material in extreme ultraviolet ray lithography, and which is excellent in homogeneity within the field and stability. concentration is 10 to 60 ppm by weight.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully