Piezoactuator
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United States of America Patent
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Jan 27, 2009
Issued Date -
N/A
app pub date -
Sep 2, 2004
filing date -
Sep 4, 2003
priority date (Note) -
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Abstract
The invention relates to a piezoactuator for miniaturized pumps, atomizers, valves or the like. The piezoactuator comprises a piezoceramic disk (1) and a pressure disk (2) coupled to the piezoceramic disk. Said pressure disk is linked on its rim (18) with a substrate (3) in a fluid-tight manner and can be deflected by the piezoceramic disk (1) while modifying the volume of a cavity (4) formed between the pressure disk (2) and the substrate (3). According to the invention, a weak point (6, 9) is provided which extends along the linked rim (18) of the pressure disk (2) and forms a joint when the pressure disk is deflected.
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