Vacuum device
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United States of America Patent
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Jan 27, 2009
Grant Date -
Dec 7, 2006
app pub date -
Jul 14, 2004
filing date -
Aug 20, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A vacuum device comprises a plurality of cryopumps (10) connected with one or a plurality of vacuum chambers. The cryopumps (10) are connected via media supply conduits (12) and media return conduits (14) with a compressor (16). An adjusting device (18) is connected before at least one of the cryopumps for controlling the amount of media fed to the cryopump. Further, the cryopumps (10) comprise a temperature measuring device. The temperature measuring device and the adjusting device (18) are connected with a controller (28). To allow the desired amount of media to be fed to the cryopumps (10), the adjusting device (18) comprises a throttle (24) in a media supply conduit (12) and a controllable valve in a throttle bypass conduit (22).
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