Automated sputtering target production and sub systems thereof
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United States of America Patent
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Jan 27, 2009
Grant Date -
May 15, 2008
app pub date -
Jan 18, 2006
filing date -
Jan 19, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
A fixture and method is provided for gripping an article, such as a sputtering target. The fixture comprises a base, a first set of contact rollers, and a second set of contact rollers, wherein at least one of the first set and the second set are adjustably positioned relative to the other of the first set and the second set on the base. The contact rollers can be configured as v-grooved wheels that will only touch chamfered portions of an outer diameter of the sputtering target when the contact rollers are clamped against the sputtering target. At least one of the first set and the second set of contact rollers can be pivotally mounted on a slide, with the slide being adjustably positioned on the base of the fixture.
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