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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

• APPLIED MATERIALS GMBH & CO. KG

International Classification(s)

• G01J:MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTE....
• G01B:MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIME....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Lotz, Hans-Georg	Gründau-Rothenbergen, DE	32	281
Schroeder, Jurgen	Gro.beta.krotzenburg, DE	8	39

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
January 13, 2009	US,7477385,B2   US7477385B2	GRANTED PATENT AS SECOND PUBLICATION
January 12, 2006	US,20060007430,A1   US20060007430A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7477385

Method of determining physical properties of an optical layer or layer system

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