Device and method for generating extreme ultraviolet (EUV) radiation
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United States of America Patent
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Jan 13, 2009
Grant Date -
Aug 31, 2006
app pub date -
Feb 14, 2006
filing date -
Feb 15, 2005
priority date (Note) -
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Abstract
It is the object of a device and method for generating extreme ultraviolet (EUV) radiation to overcome the obstacles formerly posed by the use of efficient metal emitters so that the conversion efficiency can be optimized and, as a result, the radiation output can be increased without shortening the useful life of the collector optics and electrode system. An injection nozzle of an injection device is directed to a discharge area located in a discharge chamber. The injection nozzle supplies a series of individual volumes of a source materials for the electric discharge serving to generate radiation at a repetition rate that corresponds to the frequency of the gas discharge. Further, provision is made for successively vaporizing the individual volumes in the discharge area.
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