Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination
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United States of America Patent
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Jan 6, 2009
Grant Date -
Dec 15, 2005
app pub date -
Mar 28, 2005
filing date -
Sep 30, 2002
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Abstract
There is provided an illumination system that includes (a) a light source that emits light having a wavelength ≦193 nm, where the light provides a predetermined illumination in a plane distant from the light source and defines a used area in the plane, and (b) a sensor, situated in or near the plane, for detecting light outside the used area.
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