Method of growing nitrogenous semiconductor crystal materials

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United States of America Patent

PATENT NO 7473316
SERIAL NO

09624252

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Abstract

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wherein A, B, C is an element of group II or III, N is nitrogen, M represents an element of group V or VI, and X, Y, Z, W denote the molar fraction of each element of this compound, using a, which are deposited on sapphire, SiC or Si, using various ramp functions permitting a continuous variation of the growth parameters during the initial growth.

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Patent Owner(s)

Patent OwnerAddress
AIXTRON AG52134 HERZOGENRATH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Heuken, Michael Aachen, DE 11 115
Jürgensen, Holger Aachen, DE 31 1019
Schottker, Bernd Aachen, DE 1 2
Strauch, Gerd Aachen, DE 9 514
Wachtendorf, Bernd Hsin-Chu, TW 1 2

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