Waveguiding structures with embedded microchannels and method for fabrication thereof
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United States of America Patent
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Dec 30, 2008
Grant Date -
Dec 29, 2005
app pub date -
Jun 28, 2005
filing date -
Jun 29, 2004
priority date (Note) -
Expired
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Abstract
The invention provides a method for fabricating planar waveguiding structures with embedded microchannels. The method includes the step of depositing, over a planar template having at least one indented feature comprising a ridge of a first optical material and a narrow trench adjacent thereto, a second optical material, and the step of subsequent annealing thereof, so that an embedded hollow microchannel forms within the trench. The method provides planar structures wherein the ridge and the embedded microchannel cooperate to form an optical waveguiding structure having a waveguiding direction collinear with the embedded microchannel. Embodiments of the method for forming microfluidic devices integrating ridge waveguides with hollow microchannels having surface access points for fluid delivery, and for forming photonic crystals, are disclosed together with corresponding device embodiments.
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