Method of wafer level packaging and cutting

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United States of America Patent

PATENT NO 7470565
APP PUB NO 20070166883A1
SERIAL NO

11426945

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Abstract

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A packaging wafer has a plurality of cavities and a plurality of trenches on a front surface thereof. The packaging wafer is bonded to the element wafer, and a first cutting method is performed. Afterward a piece of tape is provided and is attached to the packaging wafer. Moreover, a second cutting process is performed and then the piece of tape is removed. Therefore, a wafer level package is formed. In addition, the wafer level package is divided into a plurality of individual packages.

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Patent Owner(s)

Patent OwnerAddress
TOUCH MICRO-SYSTEM TECHNOLOGY INC566 KAO-SHI RD YANG-MEI TAOYUAN HSIEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wang, Shun-Ta Taipei Hsien, TW 3 3

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