Transfer device of handler for testing semiconductor device
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United States of America Patent
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Dec 16, 2008
Grant Date -
Jun 8, 2006
app pub date -
Aug 10, 2005
filing date -
Dec 6, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A transfer device of a handler for testing semiconductor devices is provided in which a pitch between each of a plurality of picker heads may be adjusted without replacing a cam plate. The transfer device may include a base part, a plurality of picker heads movably mounted on the base part, and a cam plate movably mounted on the base part and having a plurality of inclined cam grooves formed therein. Each picker head is connected to a corresponding cam groove by a connection part extending therebetween, with an end of each connection part movably coupled to its respective cam groove. A driving unit reciprocates the cam plate so that, as the ends of the connection parts move within the cam grooves, a position of the picker heads may be varied.
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