High impedance drive circuit for a micro-electromechanical system device
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United States of America Patent
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Dec 9, 2008
Grant Date -
N/A
app pub date -
Apr 22, 2006
filing date -
Apr 22, 2005
priority date (Note) -
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Abstract
A driver is provided for use with a MEMS device. Generally, the driver includes: (i) a high voltage circuit electrically coupled to a movable actuator of the MEMS to apply a HV pulse thereto; and (ii) a charge control circuit coupled to a base electrode formed in a substrate underlying the actuator to control a potential applied to the base electrode. The charge control circuit can include a capacitance divider having a plate capacitor defined by the actuator and the base electrode, and a charge storage capacitor electrically coupled to the base electrode and in series with the plate capacitor. The charge storage capacitor can include a variable, voltage controlled capacitor, the capacitance of which is controlled by an input signal or voltage to the driver. Other embodiments are also disclosed.
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