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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
CARL-ZEISS SMT AG	CARL-ZEISS-STRASSE 22 OBERKOCHEN 73447

International Classification(s)

• G21K:TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNET....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Egle, Wilhelm	Aalen, DE	16	200
Hainz, Joachim	Aalen, DE	17	230
Melzer, Frank	Utzmemmingen, DE	28	380
Singer, Wolfgang	Aalen, DE	152	2138
Wangler, Johannes	Koenigsbronn, DE	105	1917
Weiss, Markus	Aalen, DE	47	490
Wietzorrek, Jochen	Aalen, DE	3	67

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
December 02, 2008	US,7460212,B2   US7460212B2	GRANTED PATENT AS SECOND PUBLICATION
January 17, 2008	US,20080013680,A1   US20080013680A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7460212

Collector configured of mirror shells

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