Calibrating multiple photoelectron spectroscopy systems

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United States of America Patent

PATENT NO 7456399
SERIAL NO

11395189

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Abstract

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A method comprising obtaining a first set of spectral data for a first sample film measured by a first system, extracting intensities for one or more elemental species associated with the first sample film to provide a first set of extracted intensities using a function, and determining a first quantitative characteristic associated with the first sample film using the first set of extracted intensities. Next, obtain a second set of spectral data measured for a comparable sample film measured by a second photoelectron spectroscopy system. Next, apply the same function and continually adjust the function to extract intensities for the respective elemental species associated with the comparable sample film to provide a second set of corrected-extracted intensities. A second quantitative characteristic for the comparable sample is determined. The function is continually adjusted until the determined second quantitative characteristic closely or substantially matches the first quantitative characteristic.

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Patent OwnerAddress
NOVA MEASURING INSTRUMENTS INC3090 OAKMEAD VILLAGE DRIVE SANTA CLARA CA 95051

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Soderstrom, Eric J Palo Alto, CA 1 9

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