Method for controlling overcoat recession in a magnetic thin film head
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United States of America Patent
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Nov 25, 2008
Grant Date -
May 17, 2007
app pub date -
Nov 16, 2005
filing date -
Nov 16, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The overcoat of a slider (alumina) is recessed relative to the slider ABS by a non-abrasive CMP process sufficiently to prevent thermal protrusion of the overcoat during subsequent slider use in a hard disk drive. The CMP process involves the oscillatory and rotational compressional contact between the ABS surface of the slider and a polymerically pre-treated compliant pad that is sprayed by an aqueous alkali lubricating solution having a pH between about 9 and 10. The overcoat is thereby also softened by the lubricating solution and removed by the compressional contact and no use of abrasives is required.
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