Member switching apparatus, lens switching apparatus, laser repair apparatus, and laser inspection apparatus

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United States of America Patent

PATENT NO 7453652
APP PUB NO 20060164935A1
SERIAL NO

11326285

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A linear motor table is provided in a lens switching apparatus of a laser repair apparatus. The linear motor table is fixed with respect to a table and a laser oscillator and moves a lens holder in a horizontal direction. Six objective lenses with magnifications different from each other are provided and are held in a lens holder in a row such that the optical axes thereof are parallel to each other. The objective lens placed in the light path of laser light is switched by the linear motor table moving the lens holder. Because of this, a member, such as a lens, can be positioned with high accuracy and if positional shifting occurs, it can be quickly cancelled using a simple mechanism.

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Patent Owner(s)

Patent OwnerAddress
LASERFRONT TECHNOLOGIES INCKANAGAWA 229-1198

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nozaki, Masakazu Kanagawa, JP 1 1

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