Blazed diffractive optical element and projection objective for a microlithographic projection exposure apparatus
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United States of America Patent
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Nov 18, 2008
Grant Date -
Aug 31, 2006
app pub date -
Nov 17, 2005
filing date -
May 17, 2003
priority date (Note) -
Expired
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Abstract
A diffractive optical element has a support and a plurality of diffraction structures. The latter are applied on the support and are binary blazed by being split into substructures so that the aspect ratio of the substructures varies locally within an individual diffraction structure. One or more substructures with a large aspect ratio inside an individual diffraction structure are replaced by at least one substitute structure whose aspect ratio is less than that of the replaced substructures.
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