X-ray fluorescence spectrometer and program for use therewith
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United States of America Patent
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Nov 11, 2008
Grant Date -
Apr 19, 2007
app pub date -
Oct 17, 2006
filing date -
Oct 19, 2005
priority date (Note) -
Expired
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Abstract
A scanning X-ray fluorescence spectrometer includes a quantitatively analyzing device (18) which calculates the concentration of hexavalent chrome based on the fact that the peak spectroscopic angle, at which the maximum intensity is attained in Cr--K.alpha. line (22), changes depending on the ratio of the concentration of the hexavalent chrome vs. the concentration of the intensity of the total chrome. A plurality of detecting device (23) having different resolutions as a combination of a divergence slit (11), a spectroscopic device (6), a receiving slit (20) and a detector (8) is provided such that when the change of the peak spectroscopic angle is to be detected, a detecting device (23B) having a higher resolution than that of the detecting device (23A), which is selected when the concentration or the intensity of the total chrome is to be determined, is selected.
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